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Research unit
INNOSUISSE
Project number
17500.1 PFNM-NM
Project title
Multi-Tip NanoFrazor: Nanolithography goes from research to industry MIP: SwissLitho AG
Project status Finished
 
Start date 01.02.2015
End date 01.02.2017
 
Granted total costs 484'828.00  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % T171 Microelectronics
Last modification of the project