Multi-Tip NanoFrazor: Nanolithography goes from research to industry - Texte

zur Starseite
zur Hauptnavigation
zum Inhalt
zur Suche
zur Hilfe

Schrift Standard Fett
Login

Forschungsstelle

INNOSUISSE

Projektnummer

17500.1 PFNM-NM

Projekttitel

Multi-Tip NanoFrazor: Nanolithography goes from research to industry

Projekttitel Englisch

Multi-Tip NanoFrazor: Nanolithography goes from research to industry MIP: SwissLitho AG

Texte zu diesem Projekt

	Deutsch	Französisch	Italienisch	Englisch
Kurzbeschreibung		-	-
Abstract		-	-

Erfasste Texte

Kategorie	Text
Kurzbeschreibung (Deutsch)	Multi-Tip NanoFrazor: Nanolithography goes from research to industry
Kurzbeschreibung (Englisch)	Multi-Tip NanoFrazor: Nanolithography goes from research to industry MIP: SwissLitho AG
Abstract (Deutsch)	This project aims at bringing thermal scanning probe lithography from research laboratories to industrial settings. The project tasks include innovating: (1) a new write head for operation with multiple tips, (2) the controls system to handle multiple tips, and (3) a novel software approach to characterize and compensate for all relevant errors. The end results are expected to enable SwissLitho AG implement the next generation lithography tools in their young product line.
Abstract (Englisch)	This project aims at bringing thermal scanning probe lithography from research laboratories to industrial settings. The project tasks include innovating: (1) a new write head for operation with multiple tips, (2) the controls system to handle multiple tips, and (3) a novel software approach to characterize and compensate for all relevant errors. The end results are expected to enable SwissLitho AG implement the next generation lithography tools in their young product line.