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Research unit
INNOSUISSE
Project number
17503.1 PFNM-NM
Project title
3D Nano2Micro: enhancing the 3D fabrication range of the NanoFrazor MIP: SwissLitho AG
Project status Finished
 
Start date 01.03.2015
End date 01.03.2017
 
Granted total costs 204'470.00  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % T171 Microelectronics
Last modification of the project