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Research unit
INNOSUISSE
Project number
16677.1 PFNM-NM
Project title
Micromechanical Testing Instrument for the MEMS Industry
Project status Finished
 
Start date 01.09.2014
End date 01.09.2016
 
Granted total costs 903'490.00  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % T171 Microelectronics
Last modification of the project
27.11.2014