Micromechanical Testing Instrument for the MEMS Industry - Texte

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Forschungsstelle

INNOSUISSE

Projektnummer

16677.1 PFNM-NM

Projekttitel

Micromechanical Testing Instrument for the MEMS Industry

Projekttitel Englisch

Micromechanical Testing Instrument for the MEMS Industry

Texte zu diesem Projekt

	Deutsch	Französisch	Italienisch	Englisch
Kurzbeschreibung		-	-
Abstract		-	-

Erfasste Texte

Kategorie	Text
Kurzbeschreibung (Deutsch)	Micromechanical Testing Instrument for the MEMS Industry
Kurzbeschreibung (Englisch)	Micromechanical Testing Instrument for the MEMS Industry
Abstract (Deutsch)	The project will enable the transition of the FemtoTools micromechanical testing technology (currently used in academic R&D) to the MEMS industry. This includes the development of a novel measurement platform including a bridge-type testing instrument, the development of a two-axis MEMS force sensor, the modification of the sensor tip geometry and material as well as a further improvement of the instrument calibration and reduction of measurement uncertainty.
Abstract (Englisch)	The project will enable the transition of the FemtoTools micromechanical testing technology (currently used in academic R&D) to the MEMS industry. This includes the development of a novel measurement platform including a bridge-type testing instrument, the development of a two-axis MEMS force sensor, the modification of the sensor tip geometry and material as well as a further improvement of the instrument calibration and reduction of measurement uncertainty.