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Research unit
INNOSUISSE
Project number
14795.1;5 PFNM-NM
Project title
Hermetically sealed double conical gold via glass substrate for the MEMS encapsulation and interposer market.
Project status Finished
 
Start date 01.10.2012
End date 09.09.2014
 
Granted total costs 118'122.00  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Non divisible / inclassable research
 
Research disciplines
100 % T171 Microelectronics
Last modification of the project
27.11.2014