ServicenavigationHauptnavigationTrailKarteikarten

Research unit
INNOSUISSE
Project number
10396.1;4 INST-NM
Project title
Tests an einer neuen 'state-of-the-art' Elektronenstrahllithographieanlage zur Herstellung hochwertiger EUV-IL Masken
Project status Finished
 
Start date 05.05.2009
End date 26.05.2010
 
Granted total costs 7'500.00  CHF
Section 19 Förderbereich GL
Project category Project
Research type Applied research and development
NABS classification Non divisible / inclassable research
 
Research disciplines
100 % T150 Material technology
Last modification of the project
27.11.2014