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Research unit
INNOSUISSE
Project number
10051.1;6 PFNM-NM
Project title
Development of a cantilever based instrument for the highly precise measurement of surface stress in semiconductor production and thin film technology
Project status Finished
 
Start date 01.03.2009
End date 06.02.2013
 
Granted total costs 500'000.00  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Non divisible / inclassable research
 
Research disciplines
100 % T150 Material technology
Last modification of the project
27.11.2014