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Research unit
METAS
Project number
115.97.01
Project title
Photomask Measuring System
Project status Finished
 
Start date 01.01.1997
End date 31.12.2001
 
Section 5111 Length, Nano- and Micro-technology
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % P180 Metrology, physical instrumentation
Last modification of the project
03.07.2002