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Research unit
INNOSUISSE
Project number
6816.1;6 IWS-IW
Project title
Design, characterisation and modelling of a reactive Low Energy Plasma (LEP) Source for SiGe processing
Project status Finished
 
Start date 01.04.2004
End date 10.04.2007
 
Granted total costs 413'000.00  CHF
Section 5 CTI
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % T210 Mechanical engineering,hydraulics,vacuum techn.,vibration and acoustic eng.
Last modification of the project
27.11.2014