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Research unit
INNOSUISSE
Project number
6814.1;5 NMS-NM
Project title
Miniaturized silicon piezoresitive inclinometer
Project status Finished
 
Start date 01.09.2003
End date 28.06.2006
 
Granted total costs 387'500.00  CHF
Section 17 TOP NANO
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % T171 Microelectronics
Last modification of the project
27.11.2014