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Research unit
INNOSUISSE
Project number
6236.2;6 IWS-IW
Project title
Numerical Modelling for large aera plasma enhanced chemical vapour deposition (PECVD) reactor development
Project status Finished
 
Start date 01.05.2003
End date 07.04.2006
 
Granted total costs 242'000.00  CHF
Section 5 CTI
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % T350 Chemical technology and engineering
Last modification of the project
27.11.2014