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Research unit
INNOSUISSE
Project number
6162.2;5 KTS-NM
Project title
Online Messungen von Spezialgasen in der Mikroelektronik
Project status Finished
 
Start date 01.12.2002
End date 02.04.2013
 
Granted total costs 80'000.00  CHF
Section 5 CTI
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % T170 Electronics
Last modification of the project
27.11.2014