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Research unit
INNOSUISSE
Project number
4785.2;3 TNS-NM
Project title
High aspect ratio, deep sub-micrometer patterning of polymers with high energy ion beams
Project status Finished
 
Start date 01.01.2001
End date 28.01.2005
 
Granted total costs 75'000.00  CHF
Section 17 TOP NANO
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % Not yet defined
Last modification of the project
27.11.2014