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Research unit
INNOSUISSE
Project number
3338.2;3 MIE
Project title
Trockenäzverfahren zur Herstellung anisotroper Tiefenstrukturen in Silizium
Project status Finished
 
Start date 01.11.1996
End date 06.08.2004
 
Granted total costs 330'000.00  CHF
Section 8 Microelectronics
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % Not yet defined
Last modification of the project
27.11.2014