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Research unit
INNOSUISSE
Project number
127.036 IP-ICT
Project title
Model Predictive Control for Wafer Transport in Thin Film Deposition Tools using Combinatorial Optimization

Participants

Research organisation: Innosuisse
Swiss Innovation Agency
Einsteinstrasse 2
CH-3003 Bern
+41 58 461 61 61 (Call Center)
info@innosuisse.ch
www.innosuisse.ch/
Contact person

 Christoph Strauss
OST - Ostschweizer Fachhochschule

Scientific management
OST - Ostschweizer Fachhochschule

Implementation Partner


Evatec AG
www.uid.admin.ch/Detail.aspx?uid_id=CHE111705163