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Research unit
INNOSUISSE
Project number
47997.1 IP-ENG
Project title
Hycompact: A compact vertically stacked chamber for hybrid thin film processing

Participants

Research organisation: Innosuisse
Swiss Innovation Agency
Einsteinstrasse 2
CH-3003 Bern
+41 58 461 61 61 (Call Center)
info@innosuisse.ch
www.innosuisse.ch/
Contact person

 Doktor
Xavier Maeder
EMPA
Feuerwerkerstrasse 39
CH-3602 Thun
+41 58 765 63 30
xavier.maeder@empa.ch

Implementation Partner

Doktor
Carlos Guerra
Swiss Cluster AG
CHE-304.988.353
Feuerwerkerstrasse 39
CH-3602 Thun