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Research unit
INNOSUISSE
Project number
19193.1 PFNM-NM
Project title
Feasibility Study of COSAMI, a Compact EUV Source for Actinic Mask Inspection

Participants

Research organisation: Innosuisse
Swiss Innovation Agency
Einsteinstrasse 2
CH-3003 Bern
+41 58 461 61 61 (Call Center)
info@innosuisse.ch
www.innosuisse.ch/
Contact person

 Terence Garvey
PSI
Paul Scherrer Institut
CH-5232 Villigen
+41 56 310 46 37
terence.garvey@psi.ch