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Research unit
INNOSUISSE
Project number
10051.1;6 PFNM-NM
Project title
Development of a cantilever based instrument for the highly precise measurement of surface stress in semiconductor production and thin film technology

Participants

Research organisation: Innosuisse
Swiss Innovation Agency
Einsteinstrasse 2
CH-3003 Bern
+41 58 461 61 61 (Call Center)
info@innosuisse.ch
www.innosuisse.ch/
Contact person

 Prof. Dr.
Ernst Meyer
Universität Basel
Klingelbergstrasse 82
CH-4056 Basel
061 267 3724
Ernst.Meyer@unibas.ch