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Research unit
INNOSUISSE
Project number
6947.1;6 EPRP-IW
Project title
A new large area very high frequency (VHF) reactor for the high rate deposition of microcrystalline silicon for thin film solar cell applications

Participants

Research organisation: Innosuisse
Swiss Innovation Agency
Einsteinstrasse 2
CH-3003 Bern
+41 58 461 61 61 (Call Center)
info@innosuisse.ch
www.innosuisse.ch/
Contact person

 Dr.
Christoph Hollenstein
EPFL
Station 13
CH-1015 Lausanne
021 693 34 71
christophe.hollenstein@epfl.ch