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Research unit
INNOSUISSE
Project number
6654.1;3 NMS-NM
Project title
Micro jet perturbation reduction by etched high-pressure nozzles aiming reduction of street-width in chip-singulation by water-jet guided laser cutting

Participants

Research organisation: Innosuisse
Swiss Innovation Agency
Einsteinstrasse 2
CH-3003 Bern
+41 58 461 61 61 (Call Center)
info@innosuisse.ch
www.innosuisse.ch/
Contact person

 Dr.
Patrik Hoffmann
EPFL
STI LOA, BM 4.117, Station 17
CH-1015 Lausanne
021 693 60 18
patrik.hoffmann@epfl.ch