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Research unit
INNOSUISSE
Project number
6028.2;5 TNS-NM
Project title
Tool for nanolithography

Participants

Research organisation: Innosuisse
Swiss Innovation Agency
Einsteinstrasse 2
CH-3003 Bern
+41 58 461 61 61 (Call Center)
info@innosuisse.ch
www.innosuisse.ch/
Contact person

 Andrzej Kulik
EPFL
IPMC - station 3
CH-1015 Lausanne
021 693 33 59
andrzej.kulik@epfl.ch