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Research unit
INNOSUISSE
Project number
3651.1;3 KTS
Project title
SHA-08 - optical lithography tool for the next centry

Participants

Research organisation: Innosuisse
Swiss Innovation Agency
Einsteinstrasse 2
CH-3003 Bern
+41 58 461 61 61 (Call Center)
info@innosuisse.ch
www.innosuisse.ch/
Contact person

 Prof. Dr
Jacques Giovanola
EPFL
STI-IPR-LCSM, Station 9
CH-1015 Lausanne
021 693 29 22
jacques.giovanola@epfl.ch