MIRAGE: Micro resonant actuators for 2D scanner engines

• Research unit: EU RFP
• Project number: 99.0555

Key words (English)

Micro-mirror; scanner engine.

Alternative project number (English)

EU project number: IST-1999-10109

Research programs (English)

EU-programme: 5. Frame Research Programme - 1.2.4 Essential technologies and infrastructures

Short description (English)

See abstract

Partners and International Organizations (English)

Coordinator: Intermec STC (F)

Abstract (English)

This project aims at developing 2-D micro-mirrors technology for scanning applications. Micro-mirrors are silicon integrated mirrors of a few mm2 that can oscillate at a few kHz. It shall use CMOS compatible processes for its realisation. This basic component will be packaged in a microsystem that will integrate optical and electronic functions. The die will be contained in a miniature Chip Scale Package with cavity over the mowing mirror region, the assembly is to be delivered as a 'ready to use' element for large dissemination. Such a technology will be demonstrated for bar-code and symbols reading. It will enable optical scanning in general and will be useful for non-invasive endoscope, 3D cameras (acquisition of the third dimension with phase modulation). The project contributes to EC objectives by developing tools (scanners) for automatic identification which is a basic request for food tracking, document and health management.

References in databases (English)

Swiss Database: Euro-DB of the
State Secretariat for Education and Research
Hallwylstrasse 4
CH-3003 Berne, Switzerland
Tel. [phone]
Swiss Project-Number: 99.0555