MC4: Manufacturing Cluster 4

• Research unit: EU RFP
• Project number: 99.0055-2

Key words (English)

Micro-optics; microsystems

Alternative project number (English)

EU project number: IST-1999-12393

Research programs (English)

EU-programme: 5. Frame Research Programme - 1.2.4 Essential technologies and infrastructures

Short description (English)

See abstract

Partners and International Organizations (English)

Coordinator: TMP (NL)

Abstract (English)

The main objective of the project was to actively promote microsystem technology and to make the accessibility to microsystems effective and rapid for the industry.
Accessibility has been provided by the realization of a design-house network reducing development costs and time to market and by guaranteeing production.
The contribution of IMT-Uni NE was focused on micro-optics and optical MEMS (Micro-Electro-Mechanical Systems). IMT studied the design and fabricated test samples.
IMT transferred 5 micro-optics projects to Colibrys for manufacturing diffractive optical elements (DOEs) and refractive optical elements (ROEs). 2 MEMS projects were started. IMT has also collaborated with other European partners. IMT and LETI are working together in the frame of a new European project entitled 'Wafer level optic solutions for compact CMOS imager (WALORI)'. IMT and Heptagon are giving joint courses on micro-optics.
IMT has developed several new tools for design and analysis of diffractive elements. These tools include e.g. methods to reduce the amount of data required in modeling of large 2D-structures and methods to design DUV-beam shaping elements based on approach fundamentally different from the previous solution. Of particular interest were design concepts with relaxed fabrication tolerances (etch depth errors, alignment errors.
As part of the design house network supporting the manufacturing services at Colibrys, IMT made various designs of beam shaping elements for semiconductor lasers and excimer lasers.

Objectives
The main objective of the project was to actively promote the uptake of microsystem technologies by European industry and to make the accessibility to microsystems effective and rapid for industry.
For that purpose, four main activities were undertaken:
a) Dissemination and awareness raising (publications, exhibitions, workshops, visits, etc).
b) Creation of a Manufacturing Cluster (MC), consisting of a manufacturing unit and a network of design houses with close links to the manufacturing unit, reducing development costs and time to market as well as guaranteeing production.
c) Start with the MC partners common projects for industrial applications
d) Development of application specific standard microsystems (ASSM) so that industries can profit from existing know-how at reduced costs and risks, as well as shorter time to market.

Contribution of IMT-Uni NE
The contribution of IMT-Uni NE was focused on micro-optics and optical MEMS (Micro-Electro-Mechanical Systems). IMT investigated the modeling and fabricated test samples. This report summarizes the contribution of IMT. More information can be found in the four Progress Reports (Deliverables D11.2-1, D11.2-2, D11.2-3, D11.2-4), and the Public Report of EUROPRACTICE III, Manufacturing Cluster 4. These reports have been sent to the BBW by Colibrys.I

References in databases (English)

Swiss Database: Euro-DB of the
State Secretariat for Education and Research
Hallwylstrasse 4
CH-3003 Berne, Switzerland
Tel. [phone]
Swiss Project-Number: 99.0055-2