Abstract
(Englisch)
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The main objective of the project is to actively promote microsystem technology and to make the accessibility to microsystems effective and rapid for the industry.
Accessibility will be provided by the realisation of a design-house network reducing development costs and time to market and by guaranteeing production.
In addition, application specific standard microsystems (ASSM) and multiproject wafer (MPW) services will be provided so that industries can profit from existing know-how at reduced costs and risks, as well as shorter time to market.
Services Offered by the Cluster
a) From the design houses:
TMP offers design of microfluidic devices, mechanical microsystems and integrated optical chips. The latters are also offered as ASSM. TMP offers small-scale internal production.
IMT offers design and simulation of diffractive and refractive micro-optical elements as well as small-scale production for the realisation of demonstrators. They are particularly focussed on devices requiring large data handling, complexe functionalities, and quick design for the MPW services.
LETI will design microfluidics and physical sensors like pressure sensors, IR detectors, etc…
b) From CSEM, the manufacturing unit:
· Flexible foundry processes including test and assembly, packaging and reliability testing for medium-scale production
· MPW services for diffractive and refractive optical elements
· Accelerometers and radiation detectors as ASSM.
CSEM is also providing scientific coordination and management of the whole project.
CSEM Main Results for the Reporting Period
The network of design houses has been extended with LETI, who joined the project as partner, as well as with two affiliated design houses: IMEGO, Göteborg Sweden, and the Center for Scientific and Technological Research (IRST), Povo Italy. Contacts with other industries and institutes are going on for further extension of the design-house network. Specific projects for industrial customers were started with TMP, IMT, IMEGO, and IRST.
The MPW-DOE service has launched two runs, one in April and one in September.
The MPW-ROE is under development, three test runs have been done and one project could be started with IMT.
The accelerometer ASSMs have been improved; the modifications concern a slight redesign of the die, a new assembly technology and a new microcontroller which provides a versatile inerface particularly for sensor networks.
The ionising radiation detector ASSMs have found many promising applications in the bio-medical field. Four projects could be started:
· Breast tomography detectors, under design
· Protein crystallography detectors, in fabrication
· Dental radiography detectors, fabricated and delivered to the customer
· NDA sequencing detectors, fabricated and delivered to the customer.
Regarding promotion and dissemination of microsystem technologies, CSEM has made 10 publications, and participated at 15 conferences, exhibitions or workshops.
CSEM also assumed the coordination and general management of the project, as well as the edition of the first two progress reports for EU.
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