High temporal and spatial resolution electron microscopy in a scanning electron microscope using in-column light injection

• Unité de recherche: INNOSUISSE
• Numéro de projet: 108.454 IP-ENG
• Titre du projet anglais: High temporal and spatial resolution electron microscopy in a scanning electron microscope using in-column light injection

Mots-clé (Anglais)

Engineering, Semi-conductors

Résumé des résultats (Abstract) (Anglais)

This project aims at developing the first commercial Ultrafast Scanning electron microscope. It will draw on Attolight's expertise in ultrafast electron guns and SEM together with LMSC's deep knowledge in semiconductor science to produce a beyond state of the art tool for advanced semiconductor R&D