High temporal and spatial resolution electron microscopy in a scanning electron microscope using in-column light injection

• Research unit: INNOSUISSE
• Project number: 108.454 IP-ENG

Key words (English)

Engineering, Semi-conductors

Abstract (English)

This project aims at developing the first commercial Ultrafast Scanning electron microscope. It will draw on Attolight's expertise in ultrafast electron guns and SEM together with LMSC's deep knowledge in semiconductor science to produce a beyond state of the art tool for advanced semiconductor R&D