FATIGUE - Fabrication And Testing of hIGh temperatUre pressurE sensors

• Unité de recherche: INNOSUISSE
• Numéro de projet: 51355.1 IP-ENG
• Titre du projet anglais: FATIGUE - Fabrication And Testing of hIGh temperatUre pressurE sensors

Description succincte (Allemand)

FATIGUE - Fabrication And Testing of hIGh temperatUre pressurE sensors

Description succincte (Anglais)

FATIGUE - Fabrication And Testing of hIGh temperatUre pressurE sensors

Résumé des résultats (Abstract) (Allemand)

The proposed project aims to develop pressure sensors for high temperature (650°C) operation. It is based on novel technological approaches developed at CSEM to fabricate a new type of cost-effective MEMS sensors for harsh environments based on silicon carbide.