FATIGUE - Fabrication And Testing of hIGh temperatUre pressurE sensors

Research unit

INNOSUISSE

Project number

51355.1 IP-ENG

Project title

FATIGUE - Fabrication And Testing of hIGh temperatUre pressurE sensors

Texts for this project

	German	French	Italian	English
Short description		-	-
Abstract		-	-	-

Category	Text
Short description (German)	FATIGUE - Fabrication And Testing of hIGh temperatUre pressurE sensors
Short description (English)	FATIGUE - Fabrication And Testing of hIGh temperatUre pressurE sensors
Abstract (German)	The proposed project aims to develop pressure sensors for high temperature (650°C) operation. It is based on novel technological approaches developed at CSEM to fabricate a new type of cost-effective MEMS sensors for harsh environments based on silicon carbide.