New solutions for fast growing piezoelectric thin film demand for internet of things (IOT)

• Unité de recherche: INNOSUISSE
• Numéro de projet: 48336.1 IP-ENG
• Titre du projet anglais: New solutions for fast growing piezoelectric thin film demand for internet of things (IOT)

Description succincte (Allemand)

New solutions for fast growing piezoelectric thin film demand for internet of things (IOT)

Description succincte (Anglais)

New solutions for fast growing piezoelectric thin film demand for internet of things (IOT)

Résumé des résultats (Abstract) (Allemand)

In the past few years, the industry has realised the potential of piezoelectric MEMS as smart components for a broad range of IoT application, from actuators to sensors. The next generation of piezoelectric thin film requires new deposition techniques for high performance thin films.