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Research unit
INNOSUISSE
Project number
48336.1 IP-ENG
Project title
New solutions for fast growing piezoelectric thin film demand for internet of things (IOT)

Texts for this project

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Short description
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Abstract
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CategoryText
Short description
(German)
New solutions for fast growing piezoelectric thin film demand for internet of things (IOT)
Short description
(English)
New solutions for fast growing piezoelectric thin film demand for internet of things (IOT)
Abstract
(German)
In the past few years, the industry has realised the potential of piezoelectric MEMS as smart components for a broad range of IoT application, from actuators to sensors. The next generation of piezoelectric thin film requires new deposition techniques for high performance thin films.