Technological protocol development for production of 3D structures in light sensitive polymers with Sub-Wavelength Holographic Lithography

• Unité de recherche: INNOSUISSE
• Numéro de projet: 44552.1 IP-ENG
• Titre du projet anglais: Technological protocol development for production of 3D structures in light sensitive polymers with Sub-Wavelength Holographic Lithography

Description succincte (Allemand)

Technological protocol development for production of 3D structures in light sensitive polymers with Sub-Wavelength Holographic Lithography

Description succincte (Anglais)

Technological protocol development for production of 3D structures in light sensitive polymers with Sub-Wavelength Holographic Lithography

Résumé des résultats (Abstract) (Allemand)

Technology of Sub-Wavelength Holographic Lithographyhas (SWHL) has been developed and experimentally verified by Nanotech SWHL. For go-to-the market the technological protocols for 3D structures production in light sensitive polymers will be developed.