Thin film guided wave resonators as identifiable, wireless temperature sensor (TWIT)

• Unité de recherche: INNOSUISSE
• Numéro de projet: 26770.1 PFNM-NM
• Titre du projet anglais: Thin film guided wave resonators as identifiable, wireless temperature sensor (TWIT)

Description succincte (Allemand)

Thin film guided wave resonators as identifiable, wireless temperature sensor (TWIT)

Description succincte (Anglais)

hin film guided wave resonators as identifiable, wireless temperature sensor (TWIT)

Résumé des résultats (Abstract) (Allemand)

In this project, a temperature sensor is developed based on highly piezoelectric thin films of AlScN on sapphire substrates. The device contains a temperature dependent set of SAW-type resonators allowing for a sensor specific, identifiable response that can be detected by antennas (passive RFID).

Résumé des résultats (Abstract) (Anglais)

In this project, a temperature sensor is developed based on highly piezoelectric thin films of AlScN on sapphire substrates. The device contains a temperature dependent set of SAW-type resonators allowing for a sensor specific, identifiable response that can be detected by antennas (passive RFID).