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Research unit
INNOSUISSE
Project number
26770.1 PFNM-NM
Project title
Thin film guided wave resonators as identifiable, wireless temperature sensor (TWIT)

Texts for this project

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Short description
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Abstract
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Short description
(German)
Thin film guided wave resonators as identifiable, wireless temperature sensor (TWIT)
Short description
(English)
hin film guided wave resonators as identifiable, wireless temperature sensor (TWIT)
Abstract
(German)
In this project, a temperature sensor is developed based on highly piezoelectric thin films of AlScN on sapphire substrates. The device contains a temperature dependent set of SAW-type resonators allowing for a sensor specific, identifiable response that can be detected by antennas (passive RFID).
Abstract
(English)
In this project, a temperature sensor is developed based on highly piezoelectric thin films of AlScN on sapphire substrates. The device contains a temperature dependent set of SAW-type resonators allowing for a sensor specific, identifiable response that can be detected by antennas (passive RFID).