Innovative reactor design for large batch deposition of ultratight, biocompatible Multilayers

• Research unit: INNOSUISSE
• Project number: 25445.1 PFIW-IW

Short description (German)

Innovative reactor design for large batch deposition of ultratight, biocompatible Multilayers

Short description (English)

Innovative reactor design for large batch deposition of ultratight, biocompatible Multilayers

Abstract (German)

The use of microelectronic devices e.g. in medical environments requires new methods for the protection of the miniaturized devices. Coat-X has developed a unique proprietary technology platform based on multilayer thin films to provide a biocompatible, hermetic and flexible encapsulation for devices. The goal of the project HERMEC is the development of an innovative industrial multilayer reactor using a 3D bulk plasma for large production volumes.

Abstract (English)