Industrial Fabrication of ultra-high fill-factor microlenses (Hi-Fill)

• Unité de recherche: INNOSUISSE
• Numéro de projet: 19288.1 PFNM-NM
• Titre du projet anglais: Industrial Fabrication of ultra-high fill-factor microlenses (Hi-Fill)

Description succincte (Allemand)

Industrial Fabrication of ultra-high fill-factor microlenses (Hi-Fill)

Description succincte (Anglais)

Industrial Fabrication of ultra-high fill-factor microlenses (Hi-Fill)

Résumé des résultats (Abstract) (Allemand)

SUSS MicroOptics (SMO) uses a reflow process for wafer-based manufacturing of microlenses. SMOs process has clear advantages (costs, reproducibility and array uniformity) compared to other technologies, like e.g. grey-level, grinding, molding or laser ablation used by its competitors. However, the reflow process doesnt allow to manufacture microlens arrays with a high fill-factor. This is a major handicap for SMOs competitiveness in the Laser and Lithography market. CSEM has developed an improved reflow process based on high surface energy monolayers. The projects goal is to combine both processes enabling industrial fabrication of ultra-high fill-factor microlens arrays at SMO.

Résumé des résultats (Abstract) (Anglais)

SUSS MicroOptics (SMO) uses a reflow process for wafer-based manufacturing of microlenses. SMOs process has clear advantages (costs, reproducibility and array uniformity) compared to other technologies, like e.g. grey-level, grinding, molding or laser ablation used by its competitors. However, the reflow process doesnt allow to manufacture microlens arrays with a high fill-factor. This is a major handicap for SMOs competitiveness in the Laser and Lithography market. CSEM has developed an improved reflow process based on high surface energy monolayers. The projects goal is to combine both processes enabling industrial fabrication of ultra-high fill-factor microlens arrays at SMO.