Industrial Fabrication of ultra-high fill-factor microlenses (Hi-Fill)

• Research unit: INNOSUISSE
• Project number: 19288.1 PFNM-NM

Short description (German)

Industrial Fabrication of ultra-high fill-factor microlenses (Hi-Fill)

Short description (English)

Industrial Fabrication of ultra-high fill-factor microlenses (Hi-Fill)

Abstract (German)

SUSS MicroOptics (SMO) uses a reflow process for wafer-based manufacturing of microlenses. SMOs process has clear advantages (costs, reproducibility and array uniformity) compared to other technologies, like e.g. grey-level, grinding, molding or laser ablation used by its competitors. However, the reflow process doesnt allow to manufacture microlens arrays with a high fill-factor. This is a major handicap for SMOs competitiveness in the Laser and Lithography market. CSEM has developed an improved reflow process based on high surface energy monolayers. The projects goal is to combine both processes enabling industrial fabrication of ultra-high fill-factor microlens arrays at SMO.

Abstract (English)

SUSS MicroOptics (SMO) uses a reflow process for wafer-based manufacturing of microlenses. SMOs process has clear advantages (costs, reproducibility and array uniformity) compared to other technologies, like e.g. grey-level, grinding, molding or laser ablation used by its competitors. However, the reflow process doesnt allow to manufacture microlens arrays with a high fill-factor. This is a major handicap for SMOs competitiveness in the Laser and Lithography market. CSEM has developed an improved reflow process based on high surface energy monolayers. The projects goal is to combine both processes enabling industrial fabrication of ultra-high fill-factor microlens arrays at SMO.