Coribo: MEMS-based Micro-Coriolis Density and Flow Sensor Bonding

• Unité de recherche: INNOSUISSE
• Numéro de projet: 18894.1 PFNM-NM
• Titre du projet anglais: Coribo: MEMS-based Micro-Coriolis Density and Flow Sensor Bonding

Description succincte (Allemand)

Coribo: MEMS-based Micro-Coriolis Density and Flow Sensor Bonding

Description succincte (Anglais)

Coribo: MEMS-based Micro-Coriolis Density and Flow Sensor Bonding

Résumé des résultats (Abstract) (Allemand)

The goal of this project is to develop a volume production compatible technology to mount TrueDynes MEMS sensor to a metal carrier (manifold). At the same time the range of permitted fluids has to be extended to a few chemically aggressive fluids among Water, Ethanol/Water mixture, Gasolines, Solvent, Oxygen and Methane.

Résumé des résultats (Abstract) (Anglais)

The goal of this project is to develop a volume production compatible technology to mount TrueDynes MEMS sensor to a metal carrier (manifold). At the same time the range of permitted fluids has to be extended to a few chemically aggressive fluids among Water, Ethanol/Water mixture, Gasolines, Solvent, Oxygen and Methane.