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Research unit
INNOSUISSE
Project number
18894.1 PFNM-NM
Project title
Coribo: MEMS-based Micro-Coriolis Density and Flow Sensor Bonding

Texts for this project

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Short description
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Abstract
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CategoryText
Short description
(German)
Coribo: MEMS-based Micro-Coriolis Density and Flow Sensor Bonding
Short description
(English)
Coribo: MEMS-based Micro-Coriolis Density and Flow Sensor Bonding
Abstract
(German)
The goal of this project is to develop a volume production compatible technology to mount TrueDynes MEMS sensor to a metal carrier (manifold). At the same time the range of permitted fluids has to be extended to a few chemically aggressive fluids among Water, Ethanol/Water mixture, Gasolines, Solvent, Oxygen and Methane.
Abstract
(English)
The goal of this project is to develop a volume production compatible technology to mount TrueDynes MEMS sensor to a metal carrier (manifold). At the same time the range of permitted fluids has to be extended to a few chemically aggressive fluids among Water, Ethanol/Water mixture, Gasolines, Solvent, Oxygen and Methane.