Miniature Integrated Optical Gas Sensor

• Unité de recherche: INNOSUISSE
• Numéro de projet: 19067.1 PFNM-NM
• Titre du projet anglais: Miniature Integrated Optical Gas Sensor

Description succincte (Allemand)

Miniature Integrated Gas Sensor

Description succincte (Anglais)

Miniature Integrated Optical Gas Sensor

Résumé des résultats (Abstract) (Allemand)

A CMOS-integrated NDIR gas sensor is developed. Novel optical filters, a micro-hotplate IR emitter and MEMS thermopile IR detectors are co-integrated with CMOS electronics to form a disruptively tiny and low cost gas sensor. The new sensor complements Sensirions environmental sensor product portfolio and will generate substantial additional businesses in, but not limited to, accurate CO2 sensing for HVAC, medical and automotive markets.

Résumé des résultats (Abstract) (Anglais)

A CMOS-integrated NDIR gas sensor is developed. Novel optical filters, a micro-hotplate IR emitter and MEMS thermopile IR detectors are co-integrated with CMOS electronics to form a disruptively tiny and low cost gas sensor. The new sensor complements Sensirions environmental sensor product portfolio and will generate substantial additional businesses in, but not limited to, accurate CO2 sensing for HVAC, medical and automotive markets.