Miniature Integrated Optical Gas Sensor

• Research unit: INNOSUISSE
• Project number: 19067.1 PFNM-NM

Short description (German)

Miniature Integrated Gas Sensor

Short description (English)

Miniature Integrated Optical Gas Sensor

Abstract (German)

A CMOS-integrated NDIR gas sensor is developed. Novel optical filters, a micro-hotplate IR emitter and MEMS thermopile IR detectors are co-integrated with CMOS electronics to form a disruptively tiny and low cost gas sensor. The new sensor complements Sensirions environmental sensor product portfolio and will generate substantial additional businesses in, but not limited to, accurate CO2 sensing for HVAC, medical and automotive markets.

Abstract (English)

A CMOS-integrated NDIR gas sensor is developed. Novel optical filters, a micro-hotplate IR emitter and MEMS thermopile IR detectors are co-integrated with CMOS electronics to form a disruptively tiny and low cost gas sensor. The new sensor complements Sensirions environmental sensor product portfolio and will generate substantial additional businesses in, but not limited to, accurate CO2 sensing for HVAC, medical and automotive markets.