Description succincte
(Allemand)
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microGauge - next generation pressure sensing for vacuum coating systems
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Description succincte
(Anglais)
|
microGauge
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Résumé des résultats (Abstract)
(Allemand)
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The microGauge project seeks to develop next-generation pressure sensors for industrial vacuum coating|systems used for the depostion of thin functional layers. These thin-films include optical and decorative glass|coatings or active layers in electronic devices and displays. The proposed high-precision, full-range sensor|offers means to replace up to four state-of-the-art sensors with a single compact gauge, while enabling|improved yield and quality of the fabricated layers.
|
Résumé des résultats (Abstract)
(Anglais)
|
The microGauge project seeks to develop next-generation pressure sensors for industrial vacuum coating|systems used for the depostion of thin functional layers. These thin-films include optical and decorative glass|coatings or active layers in electronic devices and displays. The proposed high-precision, full-range sensor|offers means to replace up to four state-of-the-art sensors with a single compact gauge, while enabling|improved yield and quality of the fabricated layers.
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