microGauge - next generation pressure sensing for vacuum coating systems

• Forschungsstelle: INNOSUISSE
• Projektnummer: 18329.1 PFNM-NM
• Projekttitel Englisch: microGauge

Kurzbeschreibung (Deutsch)

microGauge - next generation pressure sensing for vacuum coating systems

Kurzbeschreibung (Englisch)

microGauge

Abstract (Deutsch)

The microGauge project seeks to develop next-generation pressure sensors for industrial vacuum coating|systems used for the depostion of thin functional layers. These thin-films include optical and decorative glass|coatings or active layers in electronic devices and displays. The proposed high-precision, full-range sensor|offers means to replace up to four state-of-the-art sensors with a single compact gauge, while enabling|improved yield and quality of the fabricated layers.

Abstract (Englisch)

The microGauge project seeks to develop next-generation pressure sensors for industrial vacuum coating|systems used for the depostion of thin functional layers. These thin-films include optical and decorative glass|coatings or active layers in electronic devices and displays. The proposed high-precision, full-range sensor|offers means to replace up to four state-of-the-art sensors with a single compact gauge, while enabling|improved yield and quality of the fabricated layers.