Multi-Tip NanoFrazor: Nanolithography goes from research to industry MIP: SwissLitho AG

• Unité de recherche: INNOSUISSE
• Numéro de projet: 17500.1 PFNM-NM
• Titre du projet anglais: Multi-Tip NanoFrazor: Nanolithography goes from research to industry MIP: SwissLitho AG

Description succincte (Allemand)

Multi-Tip NanoFrazor: Nanolithography goes from research to industry

Description succincte (Anglais)

Multi-Tip NanoFrazor: Nanolithography goes from research to industry MIP: SwissLitho AG

Résumé des résultats (Abstract) (Allemand)

This project aims at bringing thermal scanning probe lithography from research laboratories to industrial settings. The project tasks include innovating: (1) a new write head for operation with multiple tips, (2) the controls system to handle multiple tips, and (3) a novel software approach to characterize and compensate for all relevant errors. The end results are expected to enable SwissLitho AG implement the next generation lithography tools in their young product line.

Résumé des résultats (Abstract) (Anglais)

This project aims at bringing thermal scanning probe lithography from research laboratories to industrial settings. The project tasks include innovating: (1) a new write head for operation with multiple tips, (2) the controls system to handle multiple tips, and (3) a novel software approach to characterize and compensate for all relevant errors. The end results are expected to enable SwissLitho AG implement the next generation lithography tools in their young product line.