Micromechanical Testing Instrument for the MEMS Industry

• Unité de recherche: INNOSUISSE
• Numéro de projet: 16677.1 PFNM-NM
• Titre du projet anglais: Micromechanical Testing Instrument for the MEMS Industry

Description succincte (Allemand)

Micromechanical Testing Instrument for the MEMS Industry

Description succincte (Anglais)

Micromechanical Testing Instrument for the MEMS Industry

Résumé des résultats (Abstract) (Allemand)

The project will enable the transition of the FemtoTools micromechanical testing technology (currently used in academic R&D) to the MEMS industry. This includes the development of a novel measurement platform including a bridge-type testing instrument, the development of a two-axis MEMS force sensor, the modification of the sensor tip geometry and material as well as a further improvement of the instrument calibration and reduction of measurement uncertainty.

Résumé des résultats (Abstract) (Anglais)

The project will enable the transition of the FemtoTools micromechanical testing technology (currently used in academic R&D) to the MEMS industry. This includes the development of a novel measurement platform including a bridge-type testing instrument, the development of a two-axis MEMS force sensor, the modification of the sensor tip geometry and material as well as a further improvement of the instrument calibration and reduction of measurement uncertainty.