Micromechanical Testing Instrument for the MEMS Industry - Texts

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Research unit

INNOSUISSE

Project number

16677.1 PFNM-NM

Project title

Micromechanical Testing Instrument for the MEMS Industry

Texts for this project

	German	French	Italian	English
Short description		-	-
Abstract		-	-

Inserted texts

Category	Text
Short description (German)	Micromechanical Testing Instrument for the MEMS Industry
Short description (English)	Micromechanical Testing Instrument for the MEMS Industry
Abstract (German)	The project will enable the transition of the FemtoTools micromechanical testing technology (currently used in academic R&D) to the MEMS industry. This includes the development of a novel measurement platform including a bridge-type testing instrument, the development of a two-axis MEMS force sensor, the modification of the sensor tip geometry and material as well as a further improvement of the instrument calibration and reduction of measurement uncertainty.
Abstract (English)	The project will enable the transition of the FemtoTools micromechanical testing technology (currently used in academic R&D) to the MEMS industry. This includes the development of a novel measurement platform including a bridge-type testing instrument, the development of a two-axis MEMS force sensor, the modification of the sensor tip geometry and material as well as a further improvement of the instrument calibration and reduction of measurement uncertainty.