CMOS based Microsensor for Gas Sensing

• Unité de recherche: INNOSUISSE
• Numéro de projet: 17065.1 PFEN-NM
• Titre du projet anglais: CMOS based Microsensor for Gas Sensing

Description succincte (Allemand)

CMOS based Microsensor for Gas Sensing

Description succincte (Anglais)

CMOS based Microsensor for Gas Sensing

Résumé des résultats (Abstract) (Allemand)

A new type of CMOS based microsensor for gas sensing is developed. For this purpose, a proven|integrated MEMS hot plate is combined with a novel high ion mobility solid electrolyte.|The new highly integrated gas sensor will complement Sensirion's product range and will therefore generate|substantial additional business with existing customers.|Further to this, the new product will also have the potential to address new internet enabled markets that|ask for a radical miniaturisation of a gas sensor component and new sensing functionality.

Résumé des résultats (Abstract) (Anglais)

A new type of CMOS based microsensor for gas sensing is developed. For this purpose, a proven|integrated MEMS hot plate is combined with a novel high ion mobility solid electrolyte.|The new highly integrated gas sensor will complement Sensirion's product range and will therefore generate|substantial additional business with existing customers.|Further to this, the new product will also have the potential to address new internet enabled markets that|ask for a radical miniaturisation of a gas sensor component and new sensing functionality.