CMOS based Microsensor for Gas Sensing

• Research unit: INNOSUISSE
• Project number: 17065.1 PFEN-NM

Short description (German)

CMOS based Microsensor for Gas Sensing

Short description (English)

CMOS based Microsensor for Gas Sensing

Abstract (German)

A new type of CMOS based microsensor for gas sensing is developed. For this purpose, a proven|integrated MEMS hot plate is combined with a novel high ion mobility solid electrolyte.|The new highly integrated gas sensor will complement Sensirion's product range and will therefore generate|substantial additional business with existing customers.|Further to this, the new product will also have the potential to address new internet enabled markets that|ask for a radical miniaturisation of a gas sensor component and new sensing functionality.

Abstract (English)

A new type of CMOS based microsensor for gas sensing is developed. For this purpose, a proven|integrated MEMS hot plate is combined with a novel high ion mobility solid electrolyte.|The new highly integrated gas sensor will complement Sensirion's product range and will therefore generate|substantial additional business with existing customers.|Further to this, the new product will also have the potential to address new internet enabled markets that|ask for a radical miniaturisation of a gas sensor component and new sensing functionality.