Low temperature deposition of 3D conformal nanocrystalline diamond thin films

• Unité de recherche: INNOSUISSE
• Numéro de projet: 16867.2 PFNM-NM
• Titre du projet anglais: Low temperature deposition of 3D conformal nanocrystalline diamond thin films

Description succincte (Allemand)

Low temperature deposition of 3D conformal nanocrystalline diamond thin films

Description succincte (Anglais)

Low temperature deposition of 3D conformal nanocrystalline diamond thin films

Résumé des résultats (Abstract) (Allemand)

An innovative 3D conformal low temperature nano diamond thin film deposition process will be developed.|Plasma diagnosis will be used to optimize the deposition process and nano-mechanical testing procedure|employed to assess the mechanical film properties. Combinatorial lateral gradient thin films technology will|be developed and employed for interface design. Solid-state ì-wave generators will be used for up-scaling|using independent control of multiple microwave sources.

Résumé des résultats (Abstract) (Anglais)

An innovative 3D conformal low temperature nano diamond thin film deposition process will be developed.|Plasma diagnosis will be used to optimize the deposition process and nano-mechanical testing procedure|employed to assess the mechanical film properties. Combinatorial lateral gradient thin films technology will|be developed and employed for interface design. Solid-state ì-wave generators will be used for up-scaling|using independent control of multiple microwave sources.